Product Introductio

Business Introduction

H&iruja possesses advanced deposition technology essential for the manufacturing of next-generation displays and semiconductors

Business Introduction

H&iruja possesses advanced deposition technology essential for the
manufacturing of next-generation displays and semiconductors

CREJU

BP LT OX MC

The CREJU Series are devices designed for OLED manufacturing, which deposit metal materials or oxides on large-area substrates using a sputtering method in a vacuum The substrates are transported by vacuum robots

TYPE
Horizontal Pass with vacuum robot
Vertical-Depo
Key Features
MULTI LAYER Formation Capable
Substrate Heating Function
Low Particle
One Target & Maximized Target Efficiency
Auto T-M Capable Magnet for Uniformity Optimization

TYPE
Horizontal Pass with vacuum robot
Vertical-Depo
Key Features
Substrate Cooling Feature for Low-Temperature Films
MULTI LAYER Formation Capable
Low Particle
One Target & Maximized Target Efficiency
Auto T-M Capable Magnet for Uniformity

TYPE
Horizontal Pass with vacuum robot
Vertical-Depo
Key Features
MULTI LAYER Formation Capable
Substrate Heating Function
Low Particle
Maximized Target Efficiency
Auto T-M Capable Magnet for Uniformity Optimization

The CREJU Series equipment deposits on substrates while they are in motion, using a sputtering method in a vacuum state, specifically for OLED manufacturing

TYPE
Horizontal Pass with vacuum robot
Vertical-Depo
Key Features
MULTI LAYER Formation Capable
Low Particle
Maximized Target Efficiency
Auto T-M Capable Magnet for Uniformity Optimization

IVIC

BP OX MC

The IVIC Series are devices for OLED manufacturing, depositing metal materials or oxides on large-area substrates using a sputtering method in a vacuum. The substrates are transported using magnetic levitation with a Linear Motion System (LMS)

TYPE
VERICAL Pass with CARRIER
Vertical-Depo
Key Features
MULTI LAYER Formation Capable
Substrate Heating Function
Low Particle Generation
Optimized Non-contact Magnetic Levitation for Carrier Movement
Maximized Target Efficiency
Auto T-M Capable Magnet for Uniformity Optimization

The IVIC Series equipment deposits on substrates while they are in motion, using a sputtering method in a vacuum state, specifically for OLED manufacturing, with substrates moved using LMS-based magnetic levitation

TYPE
VERICAL Pass with CARRIER
Vertical-Depo
Key Features
MULTI LAYER Formation Capable
Substrate Heating Function
Low Particle Generation
Optimized Non-contact Magnetic Levitation for Carrier Movement
Maximized Target Efficiency
Auto T-M Capable Magnet for Uniformity Optimization

TYPE
Horizontal Pass with CARRIER
Horizontal -Depo
Key Features
MULTI LAYER Formation Capable
Low Particle Generation
Maximized Target Efficiency
Auto T-M Capable Magnet for Uniformity Optimization

ART

The ART Series is equipment used for depositing inorganic insulating films for OLED manufacturing using
Plasma Enhanced Chemical Vapor Deposition (PECVD) in a vacuum

TYPE
Horizontal Pass with vacuum robot
Horizontal -Depo
Key Features
MULTI LAYER Formation Capable
Substrate Heating Function
Low Particle

Semi Deposition

PLP WLP

The CREJU Series is equipment for Panel Level Packaging (PLP) manufacturing, depositing metal materials
onto substrates using a sputtering method in a vacuum, with substrate movement during deposition

TYPE
Horizontal Pass with vacuum robot
Vertical-Depo
Key Features
Multi Layer Formation Capable
Low Particle Generation
Superior Contact Resistance and Adhesion
Maximized Target Efficiency
Auto T-M Capable Magnet for Uniformity Optimization

TYPE
Horizontal Pass with vacuum robot
Horizontal-Depo
Key Features
Multi Layer Formation Capable
Substrate Heating Function
Superior Contact Resistance and Adhesion

Industrial Deposition

Solar Cell

Industrial Universal SPUTTER is equipment for depositing metals and oxides onto wafers
using a sputtering method in a vacuum, with substrate movement during deposition

TYPE
Horizontal Pass with CARRIER
Horizontal -Depo
Key Features
MULTI LAYER Formation Capable
Low Particle Generation
Maximized Target Efficiency
Auto T-M Capable Magnet for Uniformity Optimization

Product Inquiries

Thank you for your interest in our products. If you have any questions or need more detailed information,
please use the link below to contact us and we will respond promptly

Thank you for your interest in our products. If you have any questions or need more detailed information, please use the link below to contact us and we will respond promptly.