Business Introduction

H&iruja possesses advanced deposition technology essential for the manufacturing of next-generation displays and semiconductors

Business Introduction

H&iruja possesses advanced deposition technology essential for the
manufacturing of next-generation displays and semiconductors

CREJU

BPLTOXMC
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The CREJU Series are devices designed for OLED manufacturing, which deposit metal materials or oxides on large-area substrates using a sputtering method in a vacuum The substrates are transported by vacuum robots

  • TYPE
    Horizontal Pass with vacuum robot
    Vertical-Depo
  • Key Features
    MULTI LAYER Formation Capable
    Substrate Heating Function
    Low Particle
    One Target & Maximized Target Efficiency
    Auto T-M Capable Magnet for Uniformity Optimization

The CREJU Series are devices designed for OLED manufacturing, which deposit metal materials or oxides on large-area substrates using a sputtering method in a vacuum The substrates are transported by vacuum robots

  • TYPE
    Horizontal Pass with vacuum robot
    Vertical-Depo
  • Key Features
    Substrate Cooling Feature for Low-Temperature Films
    MULTI LAYER Formation Capable
    Low Particle
    One Target & Maximized Target Efficiency
    Auto T-M Capable Magnet for Uniformity

The CREJU Series are devices designed for OLED manufacturing, which deposit metal materials or oxides on large-area substrates using a sputtering method in a vacuum The substrates are transported by vacuum robots

C_OX
  • TYPE
    Horizontal Pass with vacuum robot
    Vertical-Depo
  • Key Features
    MULTI LAYER Formation Capable
    Substrate Heating Function
    Low Particle
    Maximized Target Efficiency
    Auto T-M Capable Magnet for Uniformity Optimization

The CREJU Series equipment deposits on substrates while they are in motion,
using a sputtering method in a vacuum state, specifically for OLED manufacturing

  • TYPE
    Horizontal Pass with vacuum robot
    Vertical-Depo
  • Key Features
    MULTI LAYER Formation Capable
    Low Particle
    Maximized Target Efficiency
    Auto T-M Capable Magnet for Uniformity Optimization

IVIC

BPOXMC
PreviousNext

The IVIC Series are devices for OLED manufacturing, depositing metal materials or oxides on large-area substrates using a sputtering method in a vacuum. The substrates are transported using magnetic levitation with a Linear Motion System (LMS)

  • TYPE
    VERICAL Pass with CARRIER
    Vertical-Depo
  • Key Features
    MULTI LAYER Formation Capable
    Substrate Heating Function
    Low Particle Generation
    Optimized Non-contact Magnetic Levitation for Carrier Movement
    Maximized Target Efficiency
    Auto T-M Capable Magnet for Uniformity Optimization

The IVIC Series equipment deposits on substrates while they are in motion, using a sputtering method in a vacuum state, specifically for OLED manufacturing, with substrates moved using LMS-based magnetic levitation

  • TYPE
    VERICAL Pass with CARRIER
    Vertical-Depo
  • Key Features
    MULTI LAYER Formation Capable
    Substrate Heating Function
    Low Particle Generation
    Optimized Non-contact Magnetic Levitation for Carrier Movement
    Maximized Target Efficiency
    Auto T-M Capable Magnet for Uniformity Optimization

The IVIC Series equipment deposits metal materials or oxides onto large-area substrates in a vacuum using a sputtering process for OLED manufacturing, with substrates moved using an LMS

  • TYPE
    Horizontal  Pass with CARRIER
    Horizontal -Depo
  • Key Features
    MULTI LAYER Formation Capable
    Low Particle Generation
    Maximized Target Efficiency
    Auto T-M Capable Magnet for Uniformity Optimization

ART

The ART Series is equipment used to deposit inorganic films
for OLED manufacturing under vacuum using the PECVD process

  • TYPE
    Horizontal Pass with vacuum robot
    Horizontal -Depo
  • Key Features
    High/Low Temperature PECVD
    Link/Hybrid Type Vacuum Robot
    Multi Layer
    Heating Chamber
    High Throughput
    Low Particle

Product Inquiries

Thank you for your interest in our products. If you have any questions or need more detailed information,
please use the link below to contact us and we will respond promptly

Thank you for your interest in our products. If you have any questions or need more detailed information, please use the link below to contact us and we will respond promptly.

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